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List of Selected PSC Pending/Published/Issued Patents
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Patent Number/
Application Number |
TITLE |
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US 6,982,006 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
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WO 0128950 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
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EP1237824 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
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SG88369 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
|
JP2003-512736 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
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US 2006/0107976A1 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution |
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US 6,674,054 |
Method and Apparatus for Heating a Gas-Solvent Solution |
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US 60/607,865 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution - Copper Processing I, US Provisional |
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US 60/609,200 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution - Copper Processing II, US Provisional |
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US 60/612,737 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution - Copper Processing III, US Provisional |
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US 60/638,689 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution - Copper Processing IV, US Provisional |
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US 60/709,209 |
Method and Apparatus for Treating a Substrate with an Ozone-Solvent Solution - Copper Processing V, US Provisional |
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US 2006/0084260A1 |
Copper Processing Using an Ozone-Solvent Solution |
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WO 02006029160 |
Copper Processing Using an Ozone-Solvent Solution |
Unpublished pending applications and priority applications of unpublished pending applications are
not included in the list above.
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