Our Intellectual Property - An Overview:
Cleaning and Surface Treatment IP:
PSC's IP includes, but is not limited to, methods, apparatus, systems, ozone-based treatment compositions,
complementary non-ozone-based treatment compositions, treatment recipes, and methods of manufacture, with applications
in photoresist removal, post-etch residue removal, wet cleaning, film removal, surface modification, surface conditioning, oxide
growth, and surface passivation.
Ozone-Solvent Solution Supply IP:
PSC's IP includes, but is not limited to, methods and apparatus and systems for forming and supplying ozone-water
and other ozone-solvent based treatment compositions.
PSC's IP is covered by a number of issued and pending US and International
Patents.
Licensing - An Overview:
Phifer Smith Corporation licenses its intellectual property to customers for a defined field of use.
PSC is also able to supply proprietary design point-of-use heating and chemical mixing and blending hardware components
for integration into customer systems.
Our intellectual property is available not only to equipment companies but also to device manufacturers.
